Diborane gas regulator

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- Pressure Regulators
  Single Stage Regulators
  
  Mini Regulators
  
  Pneumatically Actuated Regulators
  
  Single Stage High Pressure Regulators
  
  Single Stage Springless
  
  Single Stage Vaporizer Regulator
  
  Two Stage Regulators
  
  Crossover Manifolds
  
  Back Pressure Regulators
  
  Single stage pressure regulators for cylinder through point of use applications. The inlet pressures range from vacuum to 4,500 psig (310 bar) while outlet pressures range from absolute to 500 psig (34 bar). Flow ratings go from a few sccm up to 5,000 slpm of N2 with line sizes from ¼ inch through 1 inch.
  
  Compact single stage pressure regulators for applications where space is limited, such as inside a process tool. Available in IGS configurations, C and W seal, in addition to conventional face seal. Absolute through 100 psig (7 bar) pressure delivery range with flow rates from a few sccm to 100 slpm.
  
  A broad range of single stage pressure regulators with pneumatic actuation (PA) for pressure control in place of conventional manual spring loading.
  
  Single stage pressure regulators for higher pressures – up to 10,000 psig (690 bar) inlet and outlet. These primarily piston sensed devices are the regulators of choice for delivery pressures above 300 psig (20 bar) and line sizes from ¼ to ½ inch.
  
  Pressure regulators which do not have a wetted poppet spring. Four models are available ranging from a mini regulator, medium flow cylinder regulator to a line regulator which can deliver 300 slpm of N2.
  
  A single stage regulator for analytical applications requiring incoming sample to be vaporized. Steam is utilized to apply heat for vaporization.
  
  Pressure regulators which provide two step pressure reduction by having two single stage regulators combined in a common body. Two models are available which meet most requirements for two stage regulators. A two stage regulator is an integrated unit as opposed to two separate single stage regulators in series which also provide two stage regulation.
  
  Automatic cylinder crossover systems which provide pressure based cylinder switchover from empty to full cylinder.
  
  A back pressure regulator is basically a precision pressure relief device which is used to control a maximum gas system pressure. A single model is available.
- Valves
  Pneumatic Valves
  
  Manual Valves
  
  Metal Seated Valves
  
  Single stage pressure regulators for cylinder through point of use applications. The inlet pressures range from vacuum to 4,500 psig (310 bar) while outlet pressures range from absolute to 500 psig (34 bar). Flow ratings go from a few sccm up to 5,000 slpm of N2 with line sizes from ¼ inch through 1 inch.
  
  Compact single stage pressure regulators for applications where space is limited, such as inside a process tool. Available in IGS configurations, C and W seal, in addition to conventional face seal. Absolute through 100 psig (7 bar) pressure delivery range with flow rates from a few sccm to 100 slpm.
  
  A broad range of single stage pressure regulators with pneumatic actuation (PA) for pressure control in place of conventional manual spring loading.
  
  Single stage pressure regulators for higher pressures – up to 10,000 psig (690 bar) inlet and outlet. These primarily piston sensed devices are the regulators of choice for delivery pressures above 300 psig (20 bar) and line sizes from ¼ to ½ inch.
  
  Pressure regulators which do not have a wetted poppet spring. Four models are available ranging from a mini regulator, medium flow cylinder regulator to a line regulator which can deliver 300 slpm of N2.
  
  A single stage regulator for analytical applications requiring incoming sample to be vaporized. Steam is utilized to apply heat for vaporization.
  
  Pressure regulators which provide two step pressure reduction by having two single stage regulators combined in a common body. Two models are available which meet most requirements for two stage regulators. A two stage regulator is an integrated unit as opposed to two separate single stage regulators in series which also provide two stage regulation.
  
  Automatic cylinder crossover systems which provide pressure based cylinder switchover from empty to full cylinder.
  
  A back pressure regulator is basically a precision pressure relief device which is used to control a maximum gas system pressure. A single model is available.
  
  A broad range of pneumatically actuated diaphragm valves are available with operating pressures up to 4,500 psig (310 bar) with a mix of normally closed (NC) and normally open (NO) configurations.
  
  A broad range of manual valves is available with pressure ratings up to 4,500 psig (310 bar) with line sizes to 1 inch. The wide variety of actuation types combined with lock out / tag out (LOTO) options, sizes and pressure ratings provide the valve for most requirements.
  
  Diaphragm valves which seal metal to metal, free of a soft, plastic seat.
- Flow Devices
  Check Valve
  
  Vacuum Generators
  
  Flow Switches
  
  Single stage pressure regulators for cylinder through point of use applications. The inlet pressures range from vacuum to 4,500 psig (310 bar) while outlet pressures range from absolute to 500 psig (34 bar). Flow ratings go from a few sccm up to 5,000 slpm of N2 with line sizes from ¼ inch through 1 inch.
  
  Compact single stage pressure regulators for applications where space is limited, such as inside a process tool. Available in IGS configurations, C and W seal, in addition to conventional face seal. Absolute through 100 psig (7 bar) pressure delivery range with flow rates from a few sccm to 100 slpm.
  
  A broad range of single stage pressure regulators with pneumatic actuation (PA) for pressure control in place of conventional manual spring loading.
  
  Single stage pressure regulators for higher pressures – up to 10,000 psig (690 bar) inlet and outlet. These primarily piston sensed devices are the regulators of choice for delivery pressures above 300 psig (20 bar) and line sizes from ¼ to ½ inch.
  
  Pressure regulators which do not have a wetted poppet spring. Four models are available ranging from a mini regulator, medium flow cylinder regulator to a line regulator which can deliver 300 slpm of N2.
  
  A single stage regulator for analytical applications requiring incoming sample to be vaporized. Steam is utilized to apply heat for vaporization.
  
  Pressure regulators which provide two step pressure reduction by having two single stage regulators combined in a common body. Two models are available which meet most requirements for two stage regulators. A two stage regulator is an integrated unit as opposed to two separate single stage regulators in series which also provide two stage regulation.
  
  Automatic cylinder crossover systems which provide pressure based cylinder switchover from empty to full cylinder.
  
  A back pressure regulator is basically a precision pressure relief device which is used to control a maximum gas system pressure. A single model is available.
  
  A broad range of pneumatically actuated diaphragm valves are available with operating pressures up to 4,500 psig (310 bar) with a mix of normally closed (NC) and normally open (NO) configurations.
  
  A broad range of manual valves is available with pressure ratings up to 4,500 psig (310 bar) with line sizes to 1 inch. The wide variety of actuation types combined with lock out / tag out (LOTO) options, sizes and pressure ratings provide the valve for most requirements.
  
  Diaphragm valves which seal metal to metal, free of a soft, plastic seat.
  
  A device for reverse flow protection available in one model and rated to 3,500 psig (241 bar) operating pressure.
  
  A variety of venturi models provide vacuum in either discrete devices or integrated modules which combine vacuum venturi with N2 shut off valve and check valve in one compact unit.
  
  A wide range of flow switches is available for detecting excess flow. An online calculator enables one to easily select a switch for a given gas application.
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Diborane gas regulator best practices

Of all the gases used in semiconductor manufacturing, Diborane (formula B2H6), is the most challenging for cylinder gas regulator reliability. Diborane is normally supplied as a mixture with a balance … Read more

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Diborane gas regulator

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